19 results
Dielectric Recovery of Plasma Damaged Organosilicate Low-k Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1079 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1079-N02-10
- Print publication:
- 2008
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Copper CMP with Composite Polymer Core - Silica Shell Abrasives: A Defectivity Study
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1079 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1079-N11-04
- Print publication:
- 2008
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Effect of CH4 Plasma Treatment on O2 Plasma Ashed Organosilicate Low-k Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B03-12
- Print publication:
- 2007
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Composite polymer core – ceria shell abrasive particles during silicon oxide CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 991 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0991-C08-04
- Print publication:
- 2007
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Studies of the Coefficient of Thermal Expansion of Low-k ILD Materials by X-Ray Reflectivity
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F11-02
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- 2006
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Feasibility of Detecting Barrier Layer to Low-k Transition in Copper Cmp Using Raman Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W2.4
- Print publication:
- 2005
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Investigating the Effects of Diluting Solutions and Trace Metal Contamination on Aggregation Characteristics of Silica-Based ILD CMP Slurries
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W7.9
- Print publication:
- 2005
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8 - Treatment for colorectal cancer: impact on health-related quality of life
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- Book:
- Outcomes Assessment in Cancer
- Published online:
- 18 December 2009
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- 23 December 2004, pp 178-200
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Effect of Particle Interaction on Agglomeration of Silica-Based CMP Slurries
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- Journal:
- MRS Online Proceedings Library Archive / Volume 816 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, K4.9
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- 2004
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Pad Degradation During CMP Process: Effect of Soak in Slurry and Water on Thermal and Mechanical Properties of the CMP Pads
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- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F2.6
- Print publication:
- 2003
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Effect of CMP Pad Exposure to Aqueous Media on the Pad Properties. Part 1. Dynamic Mechanical and Modulated DSC Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 732 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, I5.4
- Print publication:
- 2002
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Current Issues and Future Trends in CMP Consumables for Oxide and Metal Polish
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- Journal:
- MRS Online Proceedings Library Archive / Volume 427 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 243
- Print publication:
- 1996
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Investigation of Pre-Tungsten Silicide Deposition Wet Chemical Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 386 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 75
- Print publication:
- 1995
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Surface Roughness Investigation of Thin SiO2 Films Deposited from N2O and SiH4
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- Journal:
- MRS Online Proceedings Library Archive / Volume 355 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 377
- Print publication:
- 1994
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Enhanced Adhesion of Copper Films to SiO2, PSG and BPSG by Refractory Metal Additions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 613
- Print publication:
- 1994
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Implications of Surface Contaminants in a Bpsg Deposition and Reflow Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 117
- Print publication:
- 1993
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Afm Studies of Surface Roughness of Borophosphosilicate Glass (BPSG) Films and Their Impact on Defect Detection Capability for Sub Micron Vlsi Technology
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- Journal:
- MRS Online Proceedings Library Archive / Volume 280 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 147
- Print publication:
- 1992
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Polysilicon/Silicon Interfaces: Effect of Processing Parameters on Physical and Electrical Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 713
- Print publication:
- 1992
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In Situ Contamination Control Investigation of Silicon Nitride Low Pressure Chemical Vapor Deposition Process in Vertical Thermal Reactors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 179
- Print publication:
- 1992
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